A compact low-cost low-maintenance open architecture mask aligner for fabrication of multilayer microfluidics devices
نویسندگان
چکیده
منابع مشابه
Low-cost, rapid-prototyping of digital microfluidics devices
An innovative and simple microfabrication method for digital microfluidics is presented. In this method, devices are formed from copper substrates or gold compact disks using rapid marker masking to replace photolithography. The new method is capable of forming devices with inter-electrode gaps as small as 50 lm. Saran wrap (polyethylene film) and commercial water repellants were used as dielec...
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ژورنال
عنوان ژورنال: Biomicrofluidics
سال: 2018
ISSN: 1932-1058
DOI: 10.1063/1.5035282